KEMSTREAM
Rue de la Vieille Poste
PIT de la Pompignane, Bat T2
34055 Montpellier Cedex 1
Phone: +33 467 20 04 10
Fax: +33 467 20 04 11
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Web : www.kemstream.com

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Exhibited Material: DLI CVD/ALD vaporizer (DLI = Direct Liquid Injection)

KEMSTREAM manufactures advanced vaporizers for CVD, MOCVD, ALD and all gas phase processes and precursors. KEMSTREAM vaporizers are able to handle and vaporize all solid and liquid precursors including low vapour pressure, thermally labile and viscous ones. They work from vacuum to atmospheric pressure and deliver accurate, repeatable and stable vapours flows. KEMSTREAM vaporizers are either DLI (Direct Liquid Injection) vaporizers or FB (Fluidized Bed) Sublimators. KEMSTREAM also manufactures liquid panels especially designed for feeding DLI vaporizers with air sensitive precursors and complete turnkey gas/vapour cabinets equipped with DLI vaporizers. KEMSTREAM provides stand alone injection heads/atomizers for Spray Pyrolysis process.